SD-1
(18L Canisters)

Tokuyama's postive-type photoresist developer SD Series are chemical agents used in photolithography processes to form circuits in semiconductor wafers. They are suitable for micro-processing because that can be used to create sharp wiring patterns. Because SD Series are organic alkaline solution, they can also be used as substitutes for inorganic alkaline developer.

• Various kinds of positive type photolithography process
• Alkali cleansers for electronic devices and other items
• Silicon etching agents for micro-electro-mechanical systems (MEMS)
• Additions for chemical-mechanical polishing (CMP) slurry

Positive-type photoresist developer is used in the photolithography process for forming patterns, or circuits, on semiconductor wafers. Photoresist (light-sensitive material) is first coated on the surface of the wafer, and then patterns are burned in through light exposure. After the exposure, the photoresist is dissolved using SD-1 to leave the wiring patterns formed. (See the illustration below.)

• High purity
  Extremely low amount of impurities such as metal ions and chlorine ions.
• Applicable to micro-processing
  Sharp wiring patterns for easy etching

Classified as a strong alkali substance with corrosive properties