SHAPAL Aluminum nitride ceramics

Generic names Aluminum nitride ceramics
Chemical formula AlN
Special properties ・High purity
・High rate of thermal conductivity
・Excellent electrical insulation
・High degree of strength
・High corrosion resistance
・Strong resistance to halogen gas plasma
・Low thermal expansion properties

Product overview

SHAPAL™ is Tokuyama's line of ceramic products, which are made by sintering aluminum nitride powder. SHAPAL™ has excellent thermal conductivity, strong resistance to halogen gas plasma, and a coefficient of thermal expansion similar to silicon. These properties are made use of in a wide range of applications, including components that require effective heat dissipation and components for semiconductor production equipment.

Product lineup

Ceramics with a high level of strength and a thickness of 1 millimeter or thinner
Applications: Power devices; LD and LED heat sinks

Ceramics with high thermal conductivity and a thickness of 2 millimeters or thinner
Applications: Semiconductor production equipment; various other usages

Ceramics with a high degree of purity (free of auxiliary additives) and a thickness of 2 millimeters or thinner
Applications: Semiconductor production equipment; prevention of internal pollution to machinery from metallic impurities; various other usages

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Properties Units SH-30 SH-15 SH-50
General properties Density g/cm3 3.34 3.33 3.24
Electrical properties
Volume resistivity Ω・cm 8.4×1013 1.1×1014 3.1×1013
Dielectric constant RT,1MHz   9.1 9.1 8.9
Dielectric loss RT,1MHz   2.5×10-4 3.0×10-4 2.6×10-4
Withstand Voltage kV/mm 36.7 31.3 18.7
Thermal properties Thermal conductivity 20°C W/(m・k) 174 184 86
Mechanical properties Bending strength MPa 511 357 356

General applications

・Power devices

・LD and LED heat sinks

・Semiconductor production equipment

・Various other usages

Inquiries Concerning Products

Thermal Management Materials Sales Dept.

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