・High purity ・High rate of thermal conductivity ・Excellent electrical insulation ・High degree of strength ・High corrosion resistance ・Transparent ・Strong resistance to halogen gas plasma ・Low thermal expansion properties
SHAPAL™ is Tokuyama's line of ceramic products, which are made by sintering aluminum nitride powder. SHAPAL™ has excellent thermal conductivity, strong resistance to halogen gas plasma, and a coefficient of thermal expansion similar to silicon. These properties are made use of in a wide range of applications, including components that require effective heat dissipation and components for semiconductor production equipment.
Ceramics with a high level of strength and a thickness of 1 millimeter or thinner
Applications: Power devices; LD and LED heat sinks
Ceramics with high thermal conductivity and a thickness of 2 millimeters or thinner
Applications: Semiconductor production equipment; various other usages
Ceramics with a high degree of purity (free of auxiliary additives) and a thickness of 2 millimeters or thinner
Applications: Semiconductor production equipment; prevention of internal pollution to machinery from metallic impurities; various other usages