SHAPAL™ Aluminum nitride ceramics

Thermal Management Material Business

Generic names Aluminum nitride ceramics
Product name SHAPAL™
Main applications Power devices; LD and LED heat sinks; semiconductor production equipment
Chemical formula AIN
Special properties High purity; high rate of thermal conductivity; excellent electrical insulation properties; high degree of strength; high corrosion resistance; translucent; strong resistance to halogen gas plasma; low thermal expansion properties

Product overview

SHAPAL

SHAPAL™

SHAPAL™ is Tokuyama's line of ceramic products, which are made by sintering aluminum nitride powder. SHAPAL™ has excellent thermal conductivity, strong resistance to halogen gas plasma, and a coefficient of thermal expansion similar to silicon. These properties are made use of in a wide range of applications, including components that must dissipate heat and components for semiconductor production equipment.

Product lineup

  • SHAPAL™ SH-30
    Ceramics with a high level of strength and a thickness of no more than 1 millimeter
    Applications: Power devices; LD and LED heat sinks
  • SHAPAL™ SH-15
    Ceramics with high thermal conductivity and a thickness of no more than 2 millimeters
    Applications: Semiconductor production equipment; various other usages
  • SHAPAL™ SH-50
    Ceramics with a high degree of purity (free of auxiliary additives) and a thickness of no more than 2 millimeters
    Applications: Semiconductor production equipment; prevention of internal damage to machinery from metallic impurities; various other usages
Properties Units SH-30 SH-15 SH-50
General properties Density g/cm3 3.34 3.33 3.24
Electrical properties Volume resistivity Ω・cm 8.4×1013 1.1×1014 3.1×1013
Dielectric constant RT,1MHz   9.1 9.1 8.9
Dielectric loss RT,1MHz   2.5×10-4 3.0×10-4 2.6×10-4
Withstand Voltage kV/mm 36.7 31.3 18.7
Thermal properties Thermal conductivity 20°C W/(m・K) 174 184 86
Mechanical properties Bending strength MPa 511 357 356

For more information:

Thermal Management Material Sales Department, Specialty Products Business Division
TEL: +81-834-34-2309
FAX: +81-834-33-3786

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