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  1. Tokuyama Corporation to Begin Joint Development of Measurement Technology for Next-Generation Semiconductor Chemicals with Taiwan's Industrial Technology Research Institute

Tokuyama Corporation to Begin Joint Development of Measurement Technology for Next-Generation Semiconductor Chemicals with Taiwan's Industrial Technology Research Institute

March 18, 2021
Tokuyama Corporation

Tokuyama Corporation today announced the launch of a project with Taiwan's Industrial Technology Research Institute (ITRI) to pursue the joint development of technology for inspecting the quality of next-generation semiconductor materials in real time.

Tokuyama is the top Asian manufacturer of high-purity chemical materials for the electronics industry manufactured at the Tokuyama Factory in Shunan City, Yamaguchi, Japan and elsewhere, and these materials are used in semiconductor manufacturing processes. In 2018, the company established a research laboratory in Taiwan, a global hub for the semiconductor industry, and since then it has been promoting technological cooperation with ITRI.

This joint development project seeks to support the production of next-generation semiconductors, which are exceedingly intricate, by quickly detecting impurities in semiconductor chemicals used in the manufacturing process. The aim is to protect wafers from contamination and improve semiconductor manufacturing yields. By applying ITRI's advanced semiconductor nano-related real-time detection technology, the two organizations will jointly develop a new measurement device and establish new chemical quality control technology for the semiconductor manufacturing process.

As the digital transformation of society driven by 5G, IoT and AI progresses, semiconductors are becoming ever more complex and miniature. This means the major challenge now faced by the semiconductor industry will be to improve manufacturing yield. Tokuyama and ITRI are working to promote the further growth of the semiconductor industry by maintaining a cooperative relationship and making the most of their respective pools of technology and experience in this industry.

Contact concerning this release:
Corporate Communications & Investor Relations Dept.
Tokuyama Corporation
TEL: +81-3-5207-2552