SHAPAL™ Aluminum nitride ceramics
SHAPAL™ is Tokuyama's line of ceramic products, which are made by sintering aluminum nitride powder. SHAPAL™ has excellent thermal conductivity, strong resistance to halogen gas plasma, and a coefficient of thermal expansion similar to silicon. These properties are made use of in a wide range of applications, including components that require effective heat dissipation and components for semiconductor production equipment.
Product overview
Generic names |
Aluminum nitride ceramics |
Chemical formula |
AlN |
Special properties |
- High purity
- High rate of thermal conductivity
- Excellent electrical insulation
- High degree of strength
- High corrosion resistance
- Transparent
- Strong resistance to halogen gas plasma
- Low thermal expansion properties
|
General applications |
- Power devices
- LD and LED heat sinks
- Semiconductor production equipment
|
Product lineup |
- SHAPAL™ SH-30
Ceramics with a high level of strength and a thickness of 1 millimeter or thinner Applications: Power devices; LD and LED heat sinks
- SHAPAL™ SH-15
Ceramics with high thermal conductivity and a thickness of 2 millimeters or thinner Applications: Semiconductor production equipment; various other usages
- SHAPAL™ SH-50
Ceramics with a high degree of purity (free of auxiliary additives) and a thickness of 2 millimeters or thinner Applications: Semiconductor production equipment; prevention of internal pollution to machinery from metallic impurities; various other usages
|
Properties |
Units |
SH-30 |
SH-15 |
SH-50 |
General properties |
Density |
g/cm2 |
3.34 |
3.33 |
3.24 |
Electrical properties |
Volume resistivity |
Ω/㎝ |
8.4×1013 |
1.1×1014 |
3.1×1013 |
Dielectric constant |
RT,1MHz |
|
9.1 |
9.1 |
8.9 |
Dielectric loss |
RT,1MHz |
|
2.5×10-4 |
3.0×10-4 |
2.6×10-4 |
Withstand Voltage |
kV/mm |
36.7 |
31.3 |
18.7 |
Thermal properties |
Thermal conductivity |
20oC |
W/(m.k) |
174 |
184 |
86 |
Mechanical properties |
Bending strength |
Mpa |
511 |
357 |
356 |
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