SHAPAL Aluminum nitride ceramics

SHAPAL™ is Tokuyama's line of ceramic products, which are made by sintering aluminum nitride powder. SHAPAL™ has excellent thermal conductivity, strong resistance to halogen gas plasma, and a coefficient of thermal expansion similar to silicon. These properties are made use of in a wide range of applications, including components that require effective heat dissipation and components for semiconductor production equipment.

Product overview

Generic names Aluminum nitride ceramics
Chemical formula AlN
Special properties
  • High purity
  • High rate of thermal conductivity
  • Excellent electrical insulation
  • High degree of strength
  • High corrosion resistance
  • Transparent
  • Strong resistance to halogen gas plasma
  • Low thermal expansion properties
General applications
  • Power devices
  • LD and LED heat sinks
  • Semiconductor production equipment
Product lineup
  • SHAPAL SH-30
    Ceramics with a high level of strength and a thickness of 1 millimeter or thinner
    Applications: Power devices; LD and LED heat sinks
  • SHAPAL SH-15
    Ceramics with high thermal conductivity and a thickness of 2 millimeters or thinner
    Applications: Semiconductor production equipment; various other usages
  • SHAPAL SH-50
    Ceramics with a high degree of purity (free of auxiliary additives) and a thickness of 2 millimeters or thinner
    Applications: Semiconductor production equipment; prevention of internal pollution to machinery from metallic impurities; various other usages
Properties Units SH-30 SH-15 SH-50
General properties Density g/cm2 3.34 3.33 3.24
Electrical properties Volume resistivity Ω/㎝ 8.4×1013 1.1×1014 3.1×1013
Dielectric constant RT,1MHz   9.1 9.1 8.9
Dielectric loss RT,1MHz   2.5×10-4 3.0×10-4 2.6×10-4
Withstand Voltage kV/mm 36.7 31.3 18.7
Thermal properties Thermal conductivity 20oC W/(m.k) 174 184 86
Mechanical properties Bending strength Mpa 511 357 356

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