Positive-Type Photoresist Developer
Tokuyama's postive-type photoresist developer "SD Series" are chemical agents used in photolithography processes (development) to form circuits in semiconductor wafers. The SD series is comprised of high-purity products with very few impurities such as metal ions and chlorine ions. These series are suitable for micro-processing because they can be used to create sharp circuit patterns.
Because "SD Series" are a strong organic alkaline solution, they can also be used as substitutes for an inorganic alkaline solution.
Tokuyama has shipping bases in Japan, Taiwan, Singapore, and China, and is strengthening its supply system to state-of-the-art semiconductor manufacturers.
|Generic names||Postive-type photoresist developer,Tetramethylammonium hydroxide (TMAH)|
|Canisters, chemical drums, polyethylene cans|
|Caution||Classified as a strong alkali substance with corrosive properties.|
* Development of various kind of resist
Positive-type photoresist developer is used in the photolithography process(development) for forming patterns, or circuits, on semiconductor wafers. Photoresist (light-sensitive material) is first coated on the surface of the wafer, and then patterns are etched through light exposure from above. After the exposure, the photoresist is dissolved using TMAH(SD series) to leave the circuit patterns formed.
- High purity
Extremely low amount of impurities such as metal ions and chlorine ions.
- Applicable to micro-processing
Sharp wiring patterns for easy etching
- Strong alkali
Colorless and transparent liquid (at room temperature)