Because Tokuyama's trichlorosilane is manufactured as an intermediate material for polycrystalline silicon, it is a high-purity product that can be used in semiconductor applications.
Trichlorosilane is employed in the manufacturing of silicone resins, discrete elements such as electric diodes, and epitaxial wafers, which are used for charge-coupled devices (CCD) and MOS-type IC substrates.

Product overview

Special characteristics

• At normal temperature, trichlorosilane is a colorless, transparent liquid with a pungent odor, and is stable only when stored in tightly sealed containers.
• By reacting to moisture in the air, trichlorosilane decomposes into corrosive hydrogen chloride gas and silica.
• Trichlorosilane is flammable and easily ignites when exposed to air.