High-purity Trichlorosilane

Electronic Materials

Generic names Trichlorosilane, TCS
Product name Trichlorosilane
Main applications Intermediary material for epitaxial wafers, polycrystalline silicon, silicone resin, and organic chemical compounds
Packing / shipping method Containers and cylinders
Chemical formula SiHCl3
Special properties Sufficiently high purity for use in semiconductors

Product overview

Because Tokuyama's trichlorosilane is manufactured as an intermediary material for polycrystalline silicon, it is a high-purity product that can be used in semiconductor applications. Trichlorosilane is employed in the manufacturing of silicone resin and epitaxial wafers, which are used for discrete elements such as electrical transistors and diodes, as well as charge-couple devices (CCD) and MOS-type IC substrates.

Special characteristics

  • Has been purified to a high enough degree to be used as an intermediary material for polycrystalline silicon
  • At room temperature, trichlorosilane is a colorless, transparent liquid with a pungent odor, and is stable only when stored in tightly sealed containers
  • Reacts to moisture in the air by decomposing into corrosive hydrogen chloride gas and silica
  • Trichlorosilane is flammable and easily ignites when exposed to air

For more information:

Polysilicon Sales Department, Specialty Products Business Division
TEL: +81-3-5207-2531
FAX: +81-3-5207-2576

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