Positive-Type Photoresist Developer

Generic names Postive-type photoresist developer, tetramethylammonium hydroxide (TMAH)
Chemical formula N(CH3)4OH
Packing / shipping method Canisters, chemical drums, polyethylene cans
Special properties Strong alkali; colorless and transparent liquid (at room temperature)

Product overview

Tokuyama's postive-type photoresist developer "SD Series" are chemical agents used in photolithography processes (development) to form circuits in semiconductor wafers.
These series are suitable for micro-processing because they can be used to create sharp circuit patterns.
Because "SD Series" are a strong organic alkaline solution, they can also be used as substitutes for an inorganic alkaline solution.

Grades

Grade name Description
SD-1 Standard type (2.38%)
SD-W Surfactant is added (2.38%)
SD-20 Conc. product (20%)
SD-25 Conc. product (25%)
Special developer Special concentrations other than standard type (2.38%)

General applications

・Photolithography process of various kinds of positive type photoresist

・Alkaline cleansers for electronic devices and other items

・Silicon etching agents for micro-electro-mechanical systems (MEMS)

・Materials for chemical-mechanical polishing (CMP) slurry

※Development of various kind of resist
Positive-type photoresist developer is used in the photolithography process(development) for forming patterns, or circuits, on semiconductor wafers. Photoresist (light-sensitive material) is first coated on the surface of the wafer, and then patterns are etched through light exposure from above. After the exposure, the photoresist is dissolved using TMAH(SD series) to leave the circuit patterns formed.
(See the illustration below.)

Photolithography process

Photolithography process
Photolithography process
Photolithography process
Photolithography process

Special characteristics

・High purity
Extremely low amount of impurities such as metal ions and chlorine ions.

・Applicable to micro-processing
Sharp wiring patterns for easy etching

Caution

Classified as a strong alkali substance with corrosive properties

Inquiries Concerning Products

IC Chemicals Sales Dept.

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